
Cleanroom compatible to Class 100

SCAQMD & NESHAP compliant

4’ x 4’ typical footprint (plus panel)

EPA and SCAQMD compliant for use with VOC’s

Water Recovery Options available
HyperFlo’s ENV 2000 (aqueous) & ENV 3000 (semi-aqueous) are the only technologies to utilize vacuum to draw cleaning & drying media into & out of difficult to reach areas so prevalent with the miniaturization of today’s devices. It is also unique as it is the only technology utilizing HyperFlo’s patented Vacuum Cycle Nucleation (VCN,
click here to learn more) technology, a non-damaging source of energy perfect for cleaning delicate features. Improved clean performance with no damage, perfect for today’s precision cleaning challenges.
To accomplish a wide range of product sizes, HyperFlo offers a number of process chamber dimensions. Please
contact us or your HyperFlo representative for more information.