VCN’s multiple process parameters can be optimized for a
wide range of applications:
- Pressure range (Typically 150~450 Torr, entire range covers 1 Torr up to 3 atmospheres)
- Vacuum cycle (frequency and process time)
- Temperature range (ambient to 200 F)
- Chemistry selection (Type, Mix, Concentration)
- Multiple process steps (3 independent fluid processing systems)
- Gas vapor pre-treatment steps
- Non-Immersion Processes (Vapor phase/ surface condensation/ nucleation/vaporization cycling)
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