"HyperFlo’s Vacuum Cycle Nucleation Technology (VCN, click here to learn more) provides the user unprecedented control in the amount & type of cleaning energy directed at a surface. This technology has proven to consistently not damage device features, structures, coatings, films & topographies while still proving to be an extremely effective clean method. To prove this VCN was applied to what may be the most delicate structures there are. That is, poly lines on a 45nm silicon semi wafer. The testing was done by IMEC, and showed that VCN in two forms did not damage delicate 45nm poly lines. In fact, VCN treatment left the features in the same condition as a DI rinse as well as a soak only process.

This type of non-damaging surface treatment has been seen on electronic, MEMS, medical, optic and numerous other device types. Please note, the subject test was designed to test lack of surface damage during VCN processing. Wafers used in the test were subject to international travel and handling. No attempt was made to demonstrate particle removal.